@inproceedings{Baryshnikova2010b, author = {M. V. Baryshnikova and V. A. Zverev and I. S. Kiseleva and V. V. Krzhizhanovskaya}, booktitle = {Proceedings of The Sixth International Conference on Computational Fluid Dynamics}, isbn = {9785965104710}, pages = {301-302}, title = {Simulation of Complex Gas Feed Systems in PECVD Reactors for Synthesis of Titanium Dioxide and Nickel Thin Films}, year = {2010} }