The processes of heat and mass transfer in modern semiconductor materials technology. Textbook for practical lessons in modeling and simulation - M. V. Bogdanov; Y. E. Gorbachev; V. V. Krzhizhanovskaya; A. V. Kulik; M. S. Ramm; D. H. Ofengeim; D. E. Tarakanov; A. V. Tsyrulnikov (2006)