@book{Bogdanov2006a, author = {M. V. Bogdanov and Y. E. Gorbachev and V. V. Krzhizhanovskaya and A. V. Kulik and M. S. Ramm and D. H. Ofengeim and D. E. Tarakanov and A. V. Tsyrulnikov}, title = {The processes of heat and mass transfer in modern semiconductor materials technology. Textbook for practical lessons in modeling and simulation}, year = {2006} }