@inproceedings{Gorbachev1998a, author = {Y. E. Gorbachev and M. A. Zatevakhin and V. V. Krzhizhanovskaya}, booktitle = {Proceedings of the All-Russian Symposium on Amorphous and Microcrystalline Semiconductors}, pages = {24}, title = {Hydrogenated Amorphous Silicon Film Growth in Remote PECVD}, year = {1998} }