Influence of Silane Dilution with Hydrogen and Inert Gases on the Dynamics of Amorphous Hydrogenated Silicon Films Growth in PECVD Reactors - Y. E. Gorbachev; M. A. Zatevakhin; V. V. Krzhizhanovskaya (Proceedings of the 2nd International Conference on Amorphous and Microcrystalline Semiconductors, 2000)