@inproceedings{Gorbachev2004a, author = {Y. E. Gorbachev and M. A. Zatevakhin and A. A. Ignatiev and V. V. Krzhizhanovskaya}, booktitle = {The 5th Minsk International Heat and Mass Transfer Forum, MIF-2004, Book of Abstracts}, pages = {301-302}, title = {Simulation of heat and mass transfer processes in PECVD reactors for silicon films growth under the conditions of intense formation of higher silanes in the gas phase}, volume = {1}, year = {2004} }