@article{Konakov2016c, author = {S. A. Konakov and V. V. Krzhizhanovskaya}, doi = {10.1088/1742-6596/681/1/012035}, eid = {012035}, issn = {1742-6588}, journal = {Journal of Physics: Conference Series}, title = {3D simulation and analytical model of chemical heating during silicon wet etching in microchannels}, volume = {681}, year = {2016} }