@inproceedings{Krzhizhanovskaya2006b, author = {V. V. Krzhizhanovskaya and P. M. A. Sloot and Y. E. Gorbachev}, booktitle = {Fracture of Nano and Engineering Materials and Structures}, doi = {10.1007/1-4020-4972-2_669}, isbn = {9781402049729}, pages = {1347-1348}, title = {Modeling of Plasma Chemical Deposition and Degradation of Silicon Thin Films}, year = {2006} }