@inproceedings{Krzhizhanovskaya2009c, author = {V. V. Krzhizhanovskaya and A. S. Smirnov and Y. E. Gorbachev and D. Ivanov and E. Sheykin and R. Wang and T. Tanaka}, booktitle = {Proceedings of ET Conference}, title = {Computer Simulation for Improving Deposition Uniformity in Large-Area RF/VHF PECVD Reactors}, year = {2009} }