Gas phase considerations for the deposition of thin film silicon solar cells by VHF-PECVD at low substrate temperatures - J. K. Rath; A. D. Verkerk; M. Brinza; R. E. I. Schropp; W. J. Goedheer; V. V. Krzhizhanovskaya; Y. E. Gorbachev; K. E. Orlov; E. M. Khilkevitch; A. S. Smirnov (Proceedings of the 33rd IEEE Photovoltaic Specialists Conference, San Diego, California, 2008)