Compensation of decreased ion energy by increased hydrogen dilution in plasma deposition of thin film silicon solar cells at low substrate temperatures - A. D. Verkerk; M. M. de Jong; J. K. Rath; M. Brinza; R. E. I. Schropp; W. J. Goedheer; V. V. Krzhizhanovskaya; Y. E. Gorbachev; K. E. Orlov; E. M. Khilkevitch; A. S. Smirnov (Materials Science and Engineering B-Advanced Functional Solid-State Materials, 2009)